Electromechanical theory of microelectromechanical devices

Microelectromechanical Devices for Wireless Communications

An overview of recent progress in the research and development of microelectromechanical devices for use in wireless communication sub-systems is presented. Among the specific devices described are tunable micromachined capacitors, integrated high-Q inductors, low loss micromechanical switches, and micro-scale vibrating mechanical resonators with Q’s in the tens of thousands. Specific applicati...

Slide film damping in microelectromechanical system devices

Film damping caused by microfluids has important effects on the dynamic characteristics of moving elements of microelectromechanical system devices. There are two kinds of film damping existing in microelectromechanical system devices, for instance, slide film damping and squeeze film damping. This article presents an overview on the recent research progress on the slide film damping in microel...

Microelectromechanical XNOR and XOR logic devices

We have developed a new microelectromechanical logic device using the MEMS (Micro Electro Mechanical Systems) technology. This device consists simply of a single cantilever and two driving electrodes with two contact pads for electrostatic operation. Both exclusive NOR (XNOR) and exclusive OR (XOR) logic devices have been realized using this simple construction.

Realization of Micromachined - Electromechanical Devices for Wireless

performance of micro-electromechanical systems devices for space applications

0